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Benefits: Individual Wafer Etch for Repeatable Results. Reduced Loading Effects. Profile Control. Extended Over Etch Capable. End Point Detector. Wide Process Window. Proven Oxide Etch Technology. Fast, Accurate RF Tuning for Precise Etch Rate Control. Reduced Defect Densities. Ease of Maintenance. Low Cost Of Ownership.
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Lam Research was founded in 1980 by David K. Lam and is headquartered in Fremont, California. As of 2023, it was the third largest manufacturer in the Bay Area, after Tesla and Intuitive Surgical.
Our solutions. Market demand for faster, smaller, more powerful, and energy-efficient electronics is driving the development of new fabrication strategies that enable producing advanced devices with fine, closely packed features and complex 3D structures.
The Lam Research Rainbow 4520 Standalone System is a single wafer, vacuum load-locked low pressure oxide etch system for etching 0.5um Contact holes at aspect ratios of <4:1.
LAM RESEARCH Rainbow 4000 Series is designed to provide high throughput and production yields in both chemical and plasma etching. The unit's advanced, computer-controlled programmable process parameters allow for fine-tuning and reproducibility over multiple etching batches.
- LAM RESEARCH
LAM RESEARCH Rainbow 4420 is a high-performance etcher/asher designed to reduce erosion, modify, and create intricate patterns on a variety of substrates, utilizing laser ablation, ion beam assisted etching, reactive ion etching and chemical vapor deposition techniques.
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OEM Group, Inc. Confidential Serial Number: 2550 Erogonomic Loaders Asset Number
