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Study with Quizlet and memorize flashcards containing terms like Definition of the etching, How many types of the etch selectivity do we have? describe them., Wet etching mechanism and more.
Jun 20, 2024 · Study with Quizlet and memorize flashcards containing terms like Etching, Selective etching, Etch Rate and more.
a category of lithographic processes that remove material from selected areas of a die. Examples are nitride etch and oxide etch . [SEMATECH] 2 : in the manufacture of silicon wafers, a solution, a mixture of solutions, or a mixture of gases that attacks the surfaces of a film or substrate, removing material either selectively or nonselectively.
• Ratio of two etch rates Example 1: SiO 2 etching with hydrofluoric acid (HF): SiO 2+ 6 HF H 2SiF 6 + 2 H 2O A. Determine the etch time for a 1,2 μm thick SiO 2 film with r SiO2 = 400 nm/min 3 min. B. How thick should the resist mask be if the selectivity is S SiO2/resist = 4? 2 1 r r S Etching: Basic Terminology
Etching can be characterized by how much of the process is: Chemical: Using the chemistry of the etch to remove material into a solution (liquid or gaseous solution) Sputtering: In plasma systems, Ions can be accelerated fast enough so as to “Ram” into the surface, “knocking out” atoms/molecules
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Jul 3, 2017 · Look up definitions of chemistry words in this comprehensive A to Z chemistry dictionary. The glossary is organized alphabetically.